Subscribe
PLANT

Vacuum measurement

XacTorr digital capacitance manometers from Brooks Instrument minimize drift, resist diaphragm contamination and minimize thermal effects in vacuum measurement applications.


XacTorr digital capacitance manometers from Brooks Instrument minimize drift, resist diaphragm contamination and minimize thermal effects in vacuum measurement applications.

They use patented dual-zone heating to ensure 0.1 degree C temperature uniformity. Mark-IV shielded sensor technology combines with patent pending digital temperature control, which reduce the build up of condensable products that lead to process drift and premature gauge failure.

The instruments come in 45, 100 and 160 degrees C digital temperature control with full-scale measurement ranges from 100 milliTorr to 1,000 Torr. And they include an RS-485 dataport, enabling in-situ monitoring and troubleshooting without disturbing communication with the vacuum chamber control system. They also offer RS-485, DeviceNet or analogue 0 to 10 VDC communications.

Brooks Instrument LLC, based in Hatfield, Pa., is a manufacturer of flow meters.

www.brooksinstrument.com