Hexapod for precise 6-DOF motion

January 4, 2022   Maryam Farag

Photo: Aerotech Inc.

Aerotech Inc. released the HEX150-140HL, a miniature hexapod six degree-of-freedom (DOF) positioning system that provides precise translation in the X, Y and Z directions and rotation around each of these axes.

The HEX150-140HL is used for addressing space-constrained, multiple DOF applications that require fine positioning resolution, including photonic device manipulation, alignment and packaging, optics inspection and alignment, optical wafer probing, aerospace and satellite sensor testing, and synchrotron and beamline sample manipulation.

Features include:

  • Minimum incremental motion of 20 nm in XYZ & 0.04 arc sec in θxθyθz.
  • High payload lift capabilities up to 7.5 kilograms and back-driving resistance to 100 N.
  • Ample range of motion for simple integration into complex applications.
  • Multi-axis (servo, stepper, piezo, etc.) motion coordination using Aerotech controllers.